ISO9001, ISO14644-1, FDA, UL, CE | GMP, cGMP, USP797, USP800
Cleanroom Components
Cleanroom Components

Door & WindowDoor & Window Cleanroom PanelsCleanroom Panels Aluminum ProfilesAluminum Profiles Cleanroom FloorCleanroom Floor

AC&CTRL
AC&CTRL

ChillerChiller AHUAHU Intelligent Control SystemIntelligent Control System

Air Shower & Pass Box
Air Shower & Pass Box

Air ShowerAir Shower Cargo Air ShowerCargo Air Shower Static Pass BoxStatic Pass Box Air Shower Pass BoxAir Shower Pass Box

Cleanroom Furniture
Cleanroom Furniture

LockerLocker Cleanroom Shoe RacksCleanroom Shoe Racks Gown Rack Gown Rack Storage CabinetStorage Cabinet Gowning BenchGowning Bench WorktableWorktable Lab ChairLab Chair TrolleyTrolley SinkSink Sink TableSink Table

Laminar Flow Cabinet
Laminar Flow Cabinet

Laminar Air Flow - Laminar WardrobeLaminar Air Flow - Laminar Wardrobe Laminar Air Flow - Laminar StorageLaminar Air Flow - Laminar Storage

Ductless Fume Hood
Ductless Fume Hood

Ductless Fume HoodDuctless Fume Hood filtration medicine cabinet hoodFiltration Medicine Cabinet Hood

Laminar Flow Bench
Laminar Flow Bench

Horizontal Laminar Flow BenchHorizontal Laminar Flow Bench Vertical Laminar Flow BenchVertical Laminar Flow Bench

ISO5 Isolator
ISO5 Isolator

Glove boxGlove box ISO5 IsolatorISO5 Isolator

Modular Cleanroom Solutions Focused on Advanced Contamination Control for Semiconductor Industry

1.Prefabricated Modular Structure
    Constructed with an aluminum alloy frame and rock wool sandwich panels, equipped with a flush-mounted return air panel system that does not protrude, saving valuable cleanroom space. All components are prefabricated and pre-assembled in Airkey factory, allowing for efficient on-site modular installation. 

Interior of a Modular Cleanroom for Semiconductor Manufacturing


2. Large auto doors and observation windows
    Fitted with large, double-leaf electric sliding doors with automatic sensors, facilitating quick material entry and exit. Double-layer tempered glass windows are installed to enable real-time monitoring of operations inside the cleanroom.

Modular Cleanrooms for Semiconductors


3. Yellow tinted glass and yellow light
    To effectively block ultraviolet interference, all glass areas are made of amber glass. The internal lighting system is uniformly equipped with amber light fixtures to meet the requirements of photosensitive process environments.

Photolithography-Compatible Yellow Light Cleanroom Solution


4. Cleanroom equipment for Contamination Control
    An air shower is installed at the personnel entry point to remove dust particles carried by individuals. A dynamic pass-through chamber is used for material transfer, ensuring indoor cleanliness.


5. Compliant Gowning Room Design
    A gowning room is set up before entering the clean area, with gowning levels classified according to cleanliness requirements.

Modular Cleanrooms for Semiconductors


6. Excellent performance and standard parameters
    After factory processing, fabrication, pre-assembly, all parameters (class, illuminance, etc.) have passed the tests, well accepted.

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