Recent Projects
Modular Cleanroom Solutions Focused on Advanced Contamination Control for Semiconductor Industry
2026-04-23
Project: Malaysia Semiconductor Modular Cleanroom
Area: 403㎡
Inner height: 3.5m
Cleanliness: ISO 6/8(Class 1,000/100,000)
Industry: Semiconductor industry
Temperature & Humidity: 22±3°C & 50-70%RH
Location: Johor, Malaysia
1.Client Profile:
Mindox is a Singapore-based corporation specialized in semiconductor platform solution. It possesses R&D, engineering, and manufacturing capabilities, combining artificial intelligence and machine learning predictive control models to improve throughput and operational efficiency. This cleanroom project is located in its its Malaysian branch.
2.Custom for Precision Wafer Processing Machinery :
The client's primary products are integrated, fully automatic modular coating/processing tools. From initial coating to final cleaning, every step is seamlessly automated to ensure absolute process control and superior repeatability. The equipment integrates uniform coating application (thickness range 10μm–200μm), precise bake solidification (temperature uniformity ±5°C), gentle yet effective post-process cleaning, and maintains a Class 100 cleanroom environment throughout.
Cleanliness: While the equipment interior is Class 100, it imposes requirements on the external cleanroom. It must be installed in an environment of at least Class 1,000 or 10,000 to reduce the burden on the equipment pre-filtration system and prevent contamination.
Pressure Differential: The equipment interior must maintain a slight positive pressure relative to the external cleanroom so that if leakage occurs, it flows outward, preventing contaminated air.
Temperature & Humidity: Typically required to be 22°C±1°C. Photoresists and curing processes are temperature-sensitive; Typically required to be 55% ± 10% RH. Excessive humidity can negatively impact coating quality (e.g., cloudiness or poor adhesion), while low humidity can generate static electricity, attracting particles or damaging sensitive circuits on the wafer.
1.Features:
1.Prefabricated Modular Structure
Constructed using aluminum frames and rock wool sandwich panels, and equipped with flush-mounted return air wall system to maximize cleanroom space. All are prefabricated in the factory, enabling rapid on-site modular installation.
2.Dedicated Goods Passage
A dedicated goods passage is equipped with large-sized high-speed roll-up doors, enabling fast, stable, and low-consumption material flow. Two doors are interlocked to ensure cleanliness.
3.Planned Changing Rooms
Changing rooms are planned before entering the cleanroom and between areas of different cleanliness levels. Equipped with air showers, they establish an efficient, compliant, and controllable personnel purification pathway.
4.Observation Windows & Acrylic Doors
Observation windows are installed at intervals along the corridor, creating a transparent and trustworthy production environment.
Large-sized transparent acrylic sliding doors allow easy opening and closing while enabling staff to observe inside.
5.Pressure Gradient with Real-Time Pressure Monitoring
Differential pressure gauges are installed in all the rooms. This ensures precise processes are protected from particle interference, strictly prevents cross-contamination between functional zones, meets audit requirements for real-time traceability of pressure data.
6.Intelligent Control Panel
FFU, RFU, and lighting are controlled by zones, achieving refined energy management based on demand. Three-level user management enhances confidentiality.
7.Precise Temperature and Humidity Control
According to client requirements, temperature is 22±3°C, humidity is 50-70% RH. Equipped with a VRV AC system and industrial dehumidifiers, it ensures client requirements are met while controlling costs, achieving an optimal balance between stability and energy efficiency.
8.Installation Services
A six-person installation team was dispatched to the client’s site, completing modular cleanroom and AC installation and acceptance within 27 days. Our company provides a one-stop standardized installation service from on-site surveying, factory prefabrication to commissioning and acceptance, transforming tight schedule pressure into reliable delivery commitments.
