Recent Projects
Modular Cleanroom Solutions Focused on Advanced Contamination Control for Semiconductor Industry
2026-04-23
Project: UK ISO6 + ISO7 Modular Cleanroom
Area: 44㎡
Inner Height: 3m
Cleanliness: ISO6 + ISO7
Industry: Semiconductor
Project Location: United Kingdom
J2P Engineering is an emerging Electrostatic Chuck (ESC) manufacturer that focuses on ESC build, cleaning, packaging, vacuum drying, and other semiconductor-related processes.
The manufacture of electrostatic chucks (ESC), especially high-end products used in semiconductor etching and deposition equipment, requires extremely stringent production environments. The main reasons include:
Impurities can cause uneven density and decreased dielectric properties, directly affecting withstand voltage and suction stability.
Particle adhesion can lead to electrode short circuits, partial discharge, or insulation breakdown.
The bonding interface must be dust-free, oil-free, and free of oxide residues. Tiny contaminants can cause uneven thermal conductivity, insufficient bonding strength, and delamination or cracking in a vacuum environment.
If trace amounts of fumes generated during welding are not promptly removed, they will adhere to the ceramic surface, causing high-voltage arcing and increased contact resistance.
A stable and clean environment is required to prevent dust from causing poor probe contact and leakage current drift.
To meet the stringent environmental requirements of ESC manufacturing, Airkey designed and delivered a modular cleanroom solution specifically tailored to the client’s production process. The cleanroom supports assembly, inspection, testing, and packaging operations while ensuring stable cleanliness and efficient workflow management.
Based on the client's production process and cost control requirements, the cleanroom is divided into two cleanliness zones:
This design meets process requirements while minimizing operational costs, achieving an exceptionally high cost-performance ratio.
To accommodate the production equipment used within the cleanroom, a total of 13 UK-standard sockets are installed across the three functional areas.
A custom-designed distribution panel provides:
Based on the visual requirements of different process steps, a combination of LED linear lights and ceiling flat-panel lights is adopted.
Lighting levels include:
Anticipating future cleanroom expansion, standard expansion interfaces and knock-out panels have been pre-installed in the structure.
Future cleanroom modules can achieve seamless physical integration with the existing system, allowing construction to proceed without interrupting ongoing production and ensuring excellent scalability and engineering coordination.
The modular cleanroom was prefabricated and fully tested at the Airkey factory before shipment.
All critical parameters passed verification, including:
The project was successfully delivered and well accepted by the customer.
