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Which industries require GMP cleanrooms?
2025-03-14
What is a semiconductor cleanroom？
Foreword: Before learn about the semiconductor cleanroom, we have to know what semiconductor materials are?
Semiconductor refers to the material that conducts electricity between a conductor and an insulator at room temperature. Semiconductors are applied to integrated circuits, consumer electronics, communication systems, photovoltaic power generation, lighting, high-power conversion and other fields, for example diodes are the most common devices made of semiconductors.
Whether from the perspective of technology or economic development, the importance of semiconductors is very significant. The core unit of most electronic products, such as computers, mobile phones or digital voice recorders, is closely related to semiconductors. Common semiconductor materials are silicon, germanium, gallium arsenide etc., and silicon is the most influential one in various semiconductor material applications.
1. Advantages of Modular Cleanrooms in Semiconductor Manufacturing
High Cleanliness:
Semiconductor processes demand extremely high levels of cleanliness. Modular cleanrooms, through reasonable airflow organization and high-efficiency filtration systems, can effectively remove dust particles and other contaminants from the air to meet the cleanliness requirements of semiconductor workshops. According to the ISO 14644 standard, semiconductor workshops typically require a cleanliness level of ISO 5 (Class 100) or higher. Modular cleanrooms are capable of meeting these stringent requirements, providing strong support for the pure production of semiconductor products.
Flexibility and Scalability:
Modular cleanrooms can be customized according to the specific needs of semiconductor workshops, including sizes, cleanliness levels, and functional zones. As semiconductor manufacturing processes evolve and change, modular cleanrooms can be conveniently expanded or modified to accommodate new production requirements. This flexibility helps semiconductor manufacturers respond quickly to market changes and technological upgrades.
Fast Installation:
Compared to traditional cleanrooms, modular cleanrooms significantly shorten project timelines through factory prefabrication and on-site assembly. On-site work primarily involves assembly, with no material cutting or welding required, minimizing environmental impact and ensuring excellent protection for the finished product.
Energy Efficiency and Environmental Friendliness:
Modular cleanrooms adopt advanced energy-saving technologies and materials, effectively reducing energy consumption and environmental impact. Through efficient airflow organization and precise temperature and humidity control, modular cleanrooms maintain a stable indoor environment, improving production efficiency and product quality while aligning with modern green manufacturing principles.
Ease of Maintenance and Cleaning:
The structural design of modular cleanrooms ensures easy maintenance and cleaning. Cleanroom equipment and materials are typically chosen for their ease of cleaning and disinfecting, effectively preventing the accumulation of dust and microorganisms—essential for semiconductor manufacturing, which demands extremely high cleanliness levels.
Smart Integration:
Modular cleanrooms can incorporate smart technologies, such as automatic navigation, remote monitoring, and fault warnings. These smart features enhance production efficiency and product quality while enabling semiconductor manufacturers to achieve a more intelligent and sustainable production model.
In conclusion, modular cleanrooms demonstrate multiple advantages in semiconductor manufacturing, making them an indispensable facility for the industry.
2. Building a Semiconductor Cleanroom from Scratch: Processes and Challenges
Processes for Building a Semiconductor Cleanroom:
Project Planning:
Determine project requirements, including production scale, product types, cleanliness requirements, and temperature/humidity needs. Consider future expansion needs and select a suitable location for the cleanroom, with a detailed project budget.
Design:
Carry out preliminary and detailed designs, covering layout, space planning, purification systems, ventilation systems, and electrical systems. Ensure the designs meet requirements for cleanliness, temperature and humidity control, and static protection.
Construction:
Execute construction, equipment installation, piping installation, and electrical wiring. Ensure the rationality and reliability of all systems.
Commissioning and Acceptance:
Perform commissioning and acceptance testing to ensure the cleanroom meets design requirements and relevant standards before handing it over for use.
Challenges in Building Semiconductor Cleanrooms:
Cleanliness Control:
Semiconductor manufacturing requires extremely strict particle and harmful gas control, with cleanliness levels meeting ISO 5 or higher. Achieving this involves using efficient air filters, rational purification systems, and airflow designs.
Temperature and Humidity Control:
Precise control of temperature and humidity is crucial, requiring advanced air conditioning systems, humidification/dehumidification devices, and sensitive temperature/humidity sensors with real-time monitoring.
Material Selection:
Use suitable materials such as epoxy flooring, photovoltaicC flooring, and coated steel panels to ensure dust resistance, moisture resistance, and ease of cleaning.
Construction Quality Control:
Implement strict quality control measures during construction to ensure each stage meets design and quality standards.
By applying scientific design and rational construction, semiconductor cleanrooms can meet requirements for high cleanliness, stability, and safety.
3. Application and Advantages of BIM Technology in Semiconductor Cleanroom Projects
Practical Applications of BIM Technology:
Comprehensive Simulation and Optimization:
BIM technology enables comprehensive project simulations, analyzing and optimizing aspects such as cleanliness, personnel and material flows, HVAC, electrical systems, energy consumption, quality, and safety. This provides a basis for design optimization and informed decision-making, improving quality, efficiency, and sustainability.
Multi-Disciplinary Collaboration:
BIM technology facilitates collaboration between different disciplines. In semiconductor cleanroom projects, BIM engineers can work with architectural and mechanical engineering teams efficiently, jointly designing and revising plans on the BIM platform. This improves communication efficiency and reduces misunderstandings or errors.
Advantages of BIM Technology:
Cost Reduction and Efficiency Improvement:
BIM optimizes design and construction plans, reducing unnecessary waste and rework, thereby lowering costs. Its visualization capabilities enhance communication efficiency and minimize costs associated with miscommunication.
Improved Construction Efficiency and Quality:
BIM provides accurate material quantity statistics and construction guidance, ensuring that workers fully understand the design and construction requirements. This improves construction efficiency and quality while reducing potential risks.
Reduced Design Disputes:
The three-dimensional modeling of BIM clearly presents design concepts, improving understanding among stakeholders and reducing the likelihood of revisions during the design phase.
Additionally, BIM offers real-time information updates and data reuse capabilities, significantly enhancing project management in semiconductor cleanroom projects.
4. Particle Control in Semiconductor Manufacturing: Impact and Solutions
Particle control in semiconductor cleanrooms is critical, as it directly impacts product quality and production efficiency. During semiconductor manufacturing, airborne particles can severely affect product quality. Chip defect density is closely related to the number of particles in the air. In addition, Microscopic particles can cause exposure errors during photolithography, leading to circuit shorts or disconnections. Meanwhile, Excessive particles increase equipment failure rates, leading to higher maintenance costs and reduced efficiency.
Solutions for Particle Control:
Air Purification and Filtration Systems:
Implementing efficient air purification and filtration systems (e.g., HEPA or ULPA filters) removes airborne particles, reducing contamination risks.
Cleanroom Maintenance:
Maintain a high level of cleanliness by regularly cleaning the cleanroom, inspecting materials and personnel entering the space, and following strict cleaning protocols.
Process Optimization:
Optimize manufacturing processes to minimize particle generation. For example, using advanced chemical-mechanical polishing (CMP) techniques reduces surface particle contamination on silicon wafers.
5. Temperature and Humidity Management and Energy-Saving Strategies in Semiconductor Cleanrooms
Temperature and humidity management in semiconductor cleanrooms is crucial. To ensure product quality, cleanroom temperatures are typically maintained between 20-24°C, with relative humidity between 40-60%. Temperature fluctuations should not exceed ±1℃. Humidity fluctuations should not exceed ±5% RH. Advanced temperature and humidity control systems, including sensors, air conditioning, and humidification/dehumidification devices, are necessary to maintain a stable environment.
Energy-Saving Strategies:
Rational Planning and Layout:
Define zones with varying cleanliness levels based on production requirements to avoid unnecessary high cleanliness demands and save energy. Optimize material and personnel flows to minimize inefficiencies and further reduce energy consumption.
Selecting High-Efficiency Energy-Saving Equipment:
Choose high-efficiency, low-resistance filters, such as HEPA filters, and energy-saving devices like variable-speed fans to reduce air resistance and fan energy consumption. In addition, use energy-efficient air conditioning systems, such as variable frequency units and geothermal heat pumps, to improve energy efficiency ratios.
Optimizing Materials and Structures:
Use smooth, easy-to-clean, and reflective materials, such as stainless steel and epoxy resin, for walls, floors, and ceilings to minimize dust accumulation and energy consumption. For doors and windows, select materials with good airtightness to reduce air infiltration and energy loss.
Implementing Energy-Saving Management Measures:
Establish energy-saving management protocols and operating procedures, clarify energy-saving targets and responsibilities, and install energy monitoring instruments and systems to provide data for energy-saving decisions.
In conclusion, the temperature and humidity management and energy-saving strategies of semiconductor cleanrooms are integrated systems requiring comprehensive consideration of multiple factors and the implementation of appropriate measures to achieve precise control and energy efficiency goals.
6.The Importance of Anti-Static Technology in Semiconductor Cleanrooms
Anti-static technology is crucial in semiconductor cleanrooms, as it plays an irreplaceable role in protecting semiconductor materials, improving product quality, and enhancing production efficiency.
Firstly, anti-static technology can prevent damage to semiconductor materials. During semiconductor production, static discharge may cause surface damage to semiconductor materials, affecting their performance and reliability. Moreover, static electricity may lead to circuit short circuits or breakdowns, resulting in product failure. By eliminating or controlling static electricity, anti-static technology effectively mitigates these potential risks.
Secondly, anti-static technology helps maintain the cleanroom environment. Static electricity can attract dust and impurities, affecting product cleanliness and quality. In semiconductor cleanrooms, even the smallest particles or contaminants can severely impact the performance and reliability of semiconductor devices. Anti-static technology reduces the adsorption of particles caused by static electricity, maintaining the cleanliness of the cleanroom and enhancing the purity and reliability of the products.
Finally, anti-static technology is an essential measure for ensuring production safety. Excessive static accumulation may lead to spark discharge, posing safety hazards in the semiconductor production environment. By implementing anti-static technologies such as anti-static workbenches, flooring, and ionizers, the risk of static buildup can be effectively reduced, ensuring production safety.
In summary, the importance of anti-static technology in semiconductor cleanrooms is self-evident. It not only protects semiconductor materials from static damage but also maintains the cleanliness of the cleanroom environment and ensures production safety.
7. How to Optimize the Efficiency and Energy Consumption of Semiconductor Cleanrooms
Optimizing the efficiency and energy consumption of semiconductor cleanrooms can be achieved through the following key strategies:
Selecting high-efficiency energy-saving equipment:
Choose equipment that meets energy efficiency standards, such as air purification devices and air conditioning systems with high efficiency and energy-saving features. Utilize high-brightness, low-energy LED lighting and arrange fixtures rationally to reduce the energy consumption of air conditioning and lighting systems.
Smart sensing and automated adjustments:
Introduce advanced control systems and sensors to enable real-time monitoring of cleanroom parameters such as airflow rates and equipment operating status. These systems can automate the optimization of air purification, cooling, and ventilation operations, enhancing equipment efficiency and reducing manual intervention.
Rational planning and layout:
Design cleanroom zones with cleanliness levels appropriate to actual production needs to avoid excessive energy use. Streamline production workflows to minimize unnecessary movement of materials and personnel, further reducing energy consumption.
Optimizing materials and structures:
Walls, floors, and ceilings should use smooth, easy-to-clean materials with reflective properties, such as stainless steel or epoxy resin, to reduce dust accumulation and energy use. Use airtight materials for doors and windows to prevent air leakage and reduce energy loss.
Employee training and equipment maintenance:
Regularly train employees on energy-efficient practices and use tools like lean production techniques to minimize waste during production. Implement detailed maintenance plans to ensure equipment runs efficiently, preventing unnecessary energy waste.
Utilizing renewable energy:
Consider integrating renewable energy sources such as solar and wind power into the cleanroom's energy supply to further reduce reliance on traditional energy sources and lower overall energy consumption.
Through the comprehensive application of these strategies, semiconductor cleanrooms can significantly improve operational efficiency while reducing energy consumption, thereby creating a sustainable, green production environment.
8. New Technological Trends in Semiconductor Cleanrooms: EUV Lithography and Advanced Packaging
The new technological trends in semiconductor cleanrooms mainly include the development of EUV lithography technology and advanced packaging technology.
EUV lithography technology:
EUV lithography is a critical step in semiconductor manufacturing. With its short wavelength, it enables the precise transfer of patterns, which is crucial for improving chip integration and performance. The challenges of EUV lithography lie in generating and maintaining the light source and designing and manufacturing the optical system. For the light source, high-purity tin is required to produce high-temperature plasma, along with powerful laser capabilities and a complex cooling system. Regarding the optical system, the extremely short wavelength of extreme ultraviolet light makes traditional lenses unusable, necessitating the use of ultra-smooth mirrors to guide the light, which imposes extremely high demands on manufacturing processes.
Advanced packaging technology:
Semiconductor technology is transitioning from 2D packaging to 3D packaging. For example, TSMC's CoWoS technology overcomes the limitations of photolithographic masks to integrate multiple chips. This shift allows for the integration of more transistors in a smaller area, thereby improving chip performance and energy efficiency. New packaging technologies such as 3D SoIC provide denser vertical interconnections, which are expected to significantly enhance chip performance and integration. Additionally, the development of high-brightness lasers brings new possibilities to advanced packaging technology. For instance, photonic crystal surface-emitting lasers (PCSELs) are anticipated to replace carbon dioxide lasers in chip manufacturing, further advancing the capabilities of advanced packaging technology.
9. Green Cleanrooms: Balancing Low Carbon and High-Efficiency Production
Achieving a balance between low carbon emissions and high-efficiency production requires optimized design, technological innovation, energy conservation, and improved production efficiency.
Firstly, optimized cleanroom design can help achieve this balance. For example, adopting low-velocity airflow designs reduces air velocity, thereby lowering energy consumption and equipment lifecycle costs. Additionally, rationally defining cleanliness levels that meet production requirements while considering various factors can reduce investment and operational expenses, meeting energy-saving demands.
Secondly, applying advanced technologies is essential for green cleanrooms to balance low carbon emissions and high efficiency. By utilizing automation and intelligent technologies, production processes can become more efficient and accurate, minimizing unnecessary energy consumption and waste. Moreover, adopting high-efficiency energy-saving systems, such as natural ventilation, heat recovery, and efficient lighting, can further reduce energy consumption.
Finally, green cleanrooms must emphasize sustainable practices. Using environmentally friendly raw materials and chemicals minimizes harm to human health and ecosystems. Additionally, prioritizing clean energy sources, such as solar and wind power, reduces dependence on fossil fuels and achieves a greener energy structure.
10.How AI and IoT Enhance the Smart Management of Semiconductor Cleanrooms
AI and IoT technologies improve semiconductor cleanroom management through real-time monitoring, data analysis, and intelligent control, significantly enhancing operational efficiency. In semiconductor cleanrooms, IoT provides a foundation for connecting various devices, enabling interaction and collaboration among sensors, actuators, and other equipment. This ensures real-time monitoring of environmental parameters and intelligent control of operations.
Applications of AI and IoT include:
Real-time monitoring and alerts:
IoT enables continuous tracking of parameters such as temperature, humidity, and particle concentrations. Alerts are triggered if values deviate from preset thresholds, allowing immediate corrective action.
Intelligent control and optimization:
AI uses real-time data to adjust equipment parameters automatically, such as airflow rates and cooling systems, maintaining optimal environmental conditions.
Predictive maintenance:
By analyzing operational data, AI identifies potential equipment issues in advance, scheduling preventive maintenance to reduce downtime.
Energy management:
AI algorithms optimize energy use based on consumption patterns, reducing energy waste and improving overall efficiency.
In summary, AI and IoT integration enhances the smart management of semiconductor cleanrooms, increasing efficiency, reducing costs, and supporting sustainable operations.
11. From Semiconductors to Photovoltaics: Cross-Industry Applications of Cleanroom Technology
Cleanroom technology has widespread applications in the semiconductor and photovoltaic (photovoltaic) industries, with increasing cross-industry utilization due to technological advancements and market demands. In the semiconductor industry, cleanrooms are indispensable for ensuring high cleanliness levels during manufacturing processes such as lithography, etching, and thin-film deposition
In the semiconductor industry, cleanroom technology serves as an indispensable foundation. Semiconductor manufacturing demands extremely high cleanliness levels in the production environment. Cleanroom technology ensures the necessary conditions for semiconductor production by precisely controlling contaminants such as particles, microorganisms, and harmful gases.
Similarly, in the photovoltaic industry, cleanroom technology plays a vital role. Although the technical precision and process requirements in the photovoltaic industry are lower compared to those in the semiconductor industry, cleanroom technology remains crucial for improving the quality and production efficiency of photovoltaic products. Specifically, in the production of silicon wafers for photovoltaics, cleanroom technology ensures the cleanliness of the production environment, preventing contamination of silicon wafers and preserving their performance and quality.
As photovoltaic technology advances and the market expands, some "outdated technologies" from the semiconductor industry have found broader applications in the photovoltaic sector. For instance, while chemical vapor deposition (CVD) technology has gradually been phased out in the semiconductor industry due to its inability to meet precision requirements, it is widely utilized in the production of TOPCon solar cells in the photovoltaic industry. This cross-industry application of technology not only drives the development of the photovoltaic sector but also creates new opportunities for the further promotion and application of cleanroom technology.
12. Applications of Semiconductor Cleanrooms
Semiconductor cleanrooms are widely utilized across various industries, including:
Semiconductor Manufacturing: For processes such as lithography, etching, and thin-film deposition.
Flat Panel Display and OLED Industries: During LCD and LED production, including liquid crystal filling and organic material coating.
Microelectronics Industry: For manufacturing integrated circuits (ICs), optoelectronic devices, and wafer products.
Photovoltaic and Renewable Energy Industries: For the production of solar cells and energy storage devices.
Optics and Precision Instrument Industries: For manufacturing precision lenses, optical components, sensors, laser devices, and optical communication equipment.
Aerospace Industry: In producing high-reliability chips for aerospace computers and satellite modules.
Automotive Electronics Industry: For manufacturing vehicle chips, LiDAR systems, and millimeter-wave radar devices.
13. Airkey’s Customized Semiconductor Cleanroom Solutions
Semiconductor cleanrooms, due to their process characteristics, require strict control of various parameters such as cleanliness, temperature, humidity, airflow, static electricity, and exhaust. Airkey’s modular cleanrooms, known for high cleanliness, flexibility, scalability, fast installation, energy efficiency, ease of maintenance, and intelligent integration, have gained increasing recognition and adoption by semiconductor clients.
Airkey provides tailored solutions based on the production process, offering rational layout designs with clear functional zoning to prevent cross-contamination. Personnel and material flows are optimized to strictly separate clean and contaminated material paths. Dedicated entry passages for personnel and material, as well as airlock rooms, may be added as needed to ensure stable and orderly airflow.
Airkey can provide optimized layout designs based on the specific characteristics of a customer’s production processes. Clear functional zoning is implemented to prevent cross-contamination, and personnel and material flow paths are optimized to strictly separate clean materials from contaminated ones. Dedicated entry and exit passages for personnel and material transportation are established, with airlocks added when necessary to ensure stable and orderly airflow within the cleanroom.
Structural materials are made from various high-strength industrial aluminum alloy profiles independently designed, developed, and molded by Airkey. These are paired with high-quality, efficient filters, purification ventilation equipment, and well-designed airflow and pressure differential systems, achieving the cleanliness level required for semiconductor workshops (Class 5 or higher). This ensures a reliable environment for the pure production of semiconductor products. Modular AC equipment and Airkey’s self-developed intelligent control system provide precise temperature and humidity control within the modular cleanroom, meeting the specific environmental requirements of the production process.
Modular Cleanroom Installation Process:
Preparation and Design Calculations:
Confirm layout plans based on client requirements, calculate design parameters for cleanliness, temperature, humidity, and pressure, and select appropriate equipment.
Factory Manufacturing:
Prefabricate components as per design specifications.
Testing and Transportation:
Assemble the modular cleanroom at the factory for parameter testing. Upon passing, disassemble, package, and transport to the site.
On-Site Assembly:
Assemble the modular cleanroom at the installation site.
Commissioning and Acceptance:
Test the cleanroom systems, including ventilation, filtration, and air conditioning, ensure compliance with specifications, and hand over for use.
The on-site assembly time for modular cleanrooms depends on their size. Small modular cleanrooms can be assembled within 3–5 days, while larger ones typically require 7–10 days. This significantly shortens project timelines and facilitates efficient production.
If you want to know more about semiconductor cleanroom projects,
find more in our industry solutions pages：Semiconductor-Airkey Envirotch Co., Ltd. (airkeyx.com)
