Project Overview
Airkey recently completed an ISO 6 modular cleanroom project for a leading manufacturer of PVD-CVD heating tapes in Wuxi, China. The facility specializes in thermal control products used in semiconductor vacuum coating equipment, including PVD and CVD process chambers.
To ensure product reliability and meet the stringent contamination requirements of semiconductor manufacturing, the customer required a cleanroom environment capable of controlling airborne particles, organic contaminants, outgassing, and metal ion contamination throughout the production process.
The final solution was a 28㎡ ISO Class 6 modular cleanroom featuring integrated air handling systems, personnel contamination control, customized production interfaces, and future expansion flexibility.
Project Information
| Item | Details |
|---|---|
| Project Name | PVD-CVD Heating Tape Modular Cleanroom |
| Location | Wuxi, China |
| Industry | Semiconductor Thermal Control Components |
| Cleanliness Level | ISO 6 (Class 1,000) |
| Size | 28㎡ |
| Internal Height | 2.2m |
| Application | PVD/CVD Heating Tape Manufacturing |
Why PVD-CVD Heating Tape Production Requires a Cleanroom
PVD-CVD heating tapes are widely used in semiconductor vacuum coating chambers where contamination control is critical. Even trace amounts of particles, organic residues, or metal ions can negatively affect vacuum integrity and thin-film deposition quality.
The manufacturing process requires strict control over several factors:
- Ultra-low particle contamination to protect wafers and optical components.
- Low outgassing performance for high-vacuum environments.
- Metal ion control to prevent process interference.
- Elimination of hydrocarbon residues from adhesives, lubricants, and cleaning agents.
- Reliable insulation and sealing performance for heating tape assemblies.
These requirements make ISO-classified cleanroom environments essential for semiconductor-related heating component production.
Airkey Modular Cleanroom Solution
To address the customer's manufacturing challenges, Airkey supplied a fully customized modular cleanroom designed specifically for semiconductor auxiliary equipment production.
The cleanroom combines a patented aluminum structure with transparent acrylic wall panels, creating a bright, highly visible workspace while maintaining structural strength and long-term durability. The modular design also supports future expansion and process upgrades.
Key Project Features
High-Transparency Acrylic Wall System
The cleanroom utilizes clear acrylic wall panels and patented aluminum profiles to provide excellent light transmission, visibility, and operational safety while maintaining a modern industrial appearance.
Integrated Air Shower and Pass Box
An air shower was installed at the personnel entrance to remove dust particles before entering the clean area. The pass-through system enables safe material transfer while minimizing contamination risks. Interlocking doors help maintain stable pressure differentials inside the cleanroom.
High-Performance EC Fan Filter Units
The cleanroom is equipped with energy-efficient EC FFUs that continuously provide clean airflow to maintain ISO 6 cleanliness. Temperature and humidity monitoring systems can be integrated with the facility HVAC system for environmental control.
Customized Production Openings
Special process openings were incorporated into the cleanroom design to accommodate conveyor systems and production workflows. Reserved openings for fire sprinkler systems ensure compliance with facility safety standards while maintaining cleanroom integrity.
Factory Prefabrication and Compliance Verification
All cleanroom components were prefabricated and assembled according to Airkey's standardized modular construction process. Upon completion, on-site testing confirmed compliance with ISO 14644 cleanroom standards, and the facility successfully passed customer acceptance testing.
Project Result
The completed ISO 6 modular cleanroom now provides a stable and contamination-controlled production environment for semiconductor heating tape manufacturing. By combining modular construction, advanced airflow management, and customized process integration, Airkey helped the customer improve production reliability while maintaining strict cleanliness requirements for semiconductor vacuum coating applications.
